Contactless Measurement of the Strain in Microcantilever Based on Position Sensitive Detector

Abstract:

We report on a novel method for measurement of the strain in microcantilever, and a contactless measurement system for strain in microcantilever is designed and implemented based on position sensitive detector (PSD) using optical lever method. To verify the validity and accuracy of the results from measurement, a finite element model of the uniform strength microcantilever has been developed to simulate mechanical behavior in microcantilever based on finite element method (FEM). The results show that results obtained from FEM and measurement based on PSD show excellent agreement. This work has provided a novel and more effective method for measurement of the strain in microcantilever.

• Periodical: Advanced Materials Research (Volumes 204-210)
• Pages: 969-972
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.204-210.969
• Online since: February 2011
• Authors: Hai Bin Pan, Lian He Yu, Guang Gui Cheng, Hui Juan Fan
• Keywords: Contactless Measurement, Finite Element Model (FEM), Micro Cantilever, Position Sensitive Detector (PSD), Strain

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