Methods of Evaluation the Uniformity in the Lapping Process
This paper reviews three methods used to evaluate the uniformity in the lapping process. The first one evaluates the uniformity in lapping process according to studying the uniformity of lapping trajectory. The second one, compared with the measurement pattern based on polar coordinate, explains the advantages of Cartesian -based coordinate pattern in evaluating the lapping uniformity. The last one develops a model to calculate material removal in the lapping process and indicates the uniformity by calculating the material removal. These methods evaluate the uniformity in lapping process from different views, respectively, but each method still has various drawbacks. Therefore, further researches must be carried out to improve the system used to evaluate the uniformity in the lapping process.
J. Zhang et al., "Methods of Evaluation the Uniformity in the Lapping Process", Advanced Materials Research, Vol. 215, pp. 47-52, 2011