Hydrogen Dilution Influence on the SIC Films Optical and Micro-Structural Properties as the Window Layer of P-i-n Solar Cell
The SiC thin films as the window layer was prepared by PECVD technology in this article, investigated the influence of hydrogen dilution on the optical and micro-structural properties of SiC thin films, Analyzed optical band-gap，deposition rate and surface morphology under different hydrogen dilution ratio, found the optimal growth craft under the same conditions. The results showed that the optical band-gap of the window layer achieved the widest 2.2ev when hydrogen dilution rate was 6.25.
Yuhang Yang, Xilong Qu, Yiping Luo and Aimin Yang
B. Y. Xu et al., "Hydrogen Dilution Influence on the SIC Films Optical and Micro-Structural Properties as the Window Layer of P-i-n Solar Cell", Advanced Materials Research, Vol. 216, pp. 266-270, 2011