Piezoelectrically Transduced Hybrid Resonators
In this paper, the design for a new piezoelectrically transduced hybrid resonator is proposed. The frequency stability problem is improved by using two different thin films with a negative and positive temperature coefficient of sound velocity, respectively, where the main vibrating structure is constructed by the SiO2 and ZnO thin films. This new hybrid resonator combines the advantages of piezoelectric and capacitive resonators together and can be implemented by the simple fabrication technique utilizing surface micromachining.
Helen Zhang, Gang Shen and David Jin
Z. Z. Wu "Piezoelectrically Transduced Hybrid Resonators", Advanced Materials Research, Vols. 219-220, pp. 1500-1503, 2011