Piezoelectrically Transduced Hybrid Resonators

Zhi Zheng Wu

doi:10.4028/www.scientific.net/AMR.219-220.1500

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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 219-220Piezoelectrically Transduced Hybrid Resonators

Piezoelectrically Transduced Hybrid Resonators

Abstract:

In this paper, the design for a new piezoelectrically transduced hybrid resonator is proposed. The frequency stability problem is improved by using two different thin films with a negative and positive temperature coefficient of sound velocity, respectively, where the main vibrating structure is constructed by the SiO₂ and ZnO thin films. This new hybrid resonator combines the advantages of piezoelectric and capacitive resonators together and can be implemented by the simple fabrication technique utilizing surface micromachining.

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Periodical:

Advanced Materials Research (Volumes 219-220)

Pages:

1500-1503

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.219-220.1500

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Online since:

March 2011

Authors:

Zhi Zheng Wu

Keywords:

Hybrid, Micro-Electromechanical System (MEMS), Piezoelectric, Resonator

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