Kelvin Probe Force Microscope Measurement Uncertainty

Maciej Ligowski; Michiharu Tabe; Ryszard Jabłoński

doi:10.4028/www.scientific.net/AMR.222.114

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HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 222Kelvin Probe Force Microscope Measurement...

Kelvin Probe Force Microscope Measurement Uncertainty

Abstract:

Kelvin Probe Force Microscopy is an attractive technique for characterizing the surface potential of various samples. The main advantage of this technique is its high spatial resolution together with high sensitivity. However as in any nanoscale measurements also in case of KFM it is extremly difficult to describe the uncertainty of the measurement. Moreover, a wide variety of measuring conditions, together with the complicated operation principle cause situation, where no standard calibration methods are available. In the paper we propose the model of the KFM microscope and analyze the uncertainty of the KFM measurement.

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Periodical:

Advanced Materials Research (Volume 222)

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114-117

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.222.114

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Online since:

April 2011

Authors:

Maciej Ligowski, Michiharu Tabe, Ryszard Jabłoński

Keywords:

Kelvin Probe Force Microscope, KFM, Uncertainty

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