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HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 254Study of Dry and Wet Oxide Etching for...

Study of Dry and Wet Oxide Etching for MOSFET-Based MEMS Devices

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NEMS/MEMS Technology and Devices, ICMAT2011

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Periodical:

Advanced Materials Research (Volume 254)

Pages:

152-154

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.254.152

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Online since:

May 2011

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© 2011 Trans Tech Publications Ltd. All Rights Reserved

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