Piezoelectrically Transduced Resonators with Robust Resonance Frequency
In this paper, the design for a new piezoelectrically transduced hybrid resonator with robust resonance frequency is proposed. The frequency stability problem is improved by two compensation methods for the resonator. One is to use two different thin films with a negative and positive temperature coefficient of sound velocity respectively to construct the vibrating structure by the SiO2 and ZnO thin films, and the other is to use the feedback technology to compensate the frequency shift by adjusting the electric stiffness of the resonator.
Z. Z. Wu "Piezoelectrically Transduced Resonators with Robust Resonance Frequency", Advanced Materials Research, Vol. 267, pp. 715-719, 2011