The Analysis and Study Based on MEMS Sensor
A kind of ultra micro pressure range MEMS pressure sensor is elaborated and analyzed in detail. The chip structure selection of pressure sensor is researched by the relative theory and the reasonable chip structure is designed in this paper. In order to design the Wheatstone bridge properly, we explore the width and length of the resistors on the membrane of the pressure sensor. At last, through the finite element analysis method, the relevant dynamic properties are analyzed for the sensor too. The dynamic response time is 3.2×10-5s. The response speed is fast and the sensor has many advantages under the periodic variation pressure.
Helen Zhang and David Jin
Y. B. LI et al., "The Analysis and Study Based on MEMS Sensor", Advanced Materials Research, Vols. 282-283, pp. 271-274, 2011