The Analysis and Study Based on MEMS Sensor

Yan Bing LI; Meng Yuan; Ji Yong Xu

doi:10.4028/www.scientific.net/AMR.282-283.271

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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 282-283The Analysis and Study Based on MEMS Sensor

The Analysis and Study Based on MEMS Sensor

Abstract:

A kind of ultra micro pressure range MEMS pressure sensor is elaborated and analyzed in detail. The chip structure selection of pressure sensor is researched by the relative theory and the reasonable chip structure is designed in this paper. In order to design the Wheatstone bridge properly, we explore the width and length of the resistors on the membrane of the pressure sensor. At last, through the finite element analysis method, the relevant dynamic properties are analyzed for the sensor too. The dynamic response time is 3.2×10^-5s. The response speed is fast and the sensor has many advantages under the periodic variation pressure.

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Periodical:

Advanced Materials Research (Volumes 282-283)

Pages:

271-274

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.282-283.271

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Online since:

July 2011

Authors:

Yan Bing LI, Meng Yuan, Ji Yong Xu

Keywords:

Dynamic Study, MEMS Sensor, Resistance Design, Theory Analysis, Ultra Micro Pressure Range

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