Effect of Target Power and Bias on Adhesive Force of BCN Films

Kai Bi; Jun Liu; Qi Xun Dai

doi:10.4028/www.scientific.net/AMR.287-290.2148

Paper Titles

Effect of Substrate Temperature on Properties of CuInSe₂ Thin Films Deposited by Magnetron Sputtering
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Investigation of Microstructure and Tribological Properties of Cr_xTi_1-XN Composite Films on Piston Rings
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Growth of ZnS Films and Application in Heterojunction
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SSI Damping System Research Based on Discontinuity of the Motion
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Effect of Target Power and Bias on Adhesive Force of BCN Films
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Fundamental Research on the Mechanism of High-Speed Welding Undercut
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Study on Ultrafiltration Membrane Technology for Water Purification in Zhengzhou
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Influence of Anisotropy Behavior in UOE Process for X80 Micro Alloy Steel
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Spectroscopic Ellipsometry Study on HfO₂ Thin Films Deposited at Different RF Powers
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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 287-290Effect of Target Power and Bias on Adhesive Force...

Effect of Target Power and Bias on Adhesive Force of BCN Films

Abstract:

Boron carbon nitride (BCN) is a new type of super-hard material with excellent properties, and is very suitable for use as a wear-resistant protective coating and solid lubricant. In this report, we prepared BCN films on YG8 cemented carbide substrate by magnetron sputtering. The structure and composition of the films were analyzed by X-ray diffraction (XRD) and Fourier transform infrared spectroscopy (FTIR). The adhesiveness of the films was studied by scratch test. Results from these analyses show that BCN films deposited on the YG8 substrate has good adhesion properties. We also demonstrated that target power and substrate bias have a great impact on the adhesiveness of the films, and reasonable process parameters can improve the adhesiveness of the films.