Effect of Target Power and Bias on Adhesive Force of BCN Films
Boron carbon nitride (BCN) is a new type of super-hard material with excellent properties, and is very suitable for use as a wear-resistant protective coating and solid lubricant. In this report, we prepared BCN films on YG8 cemented carbide substrate by magnetron sputtering. The structure and composition of the films were analyzed by X-ray diffraction (XRD) and Fourier transform infrared spectroscopy (FTIR). The adhesiveness of the films was studied by scratch test. Results from these analyses show that BCN films deposited on the YG8 substrate has good adhesion properties. We also demonstrated that target power and substrate bias have a great impact on the adhesiveness of the films, and reasonable process parameters can improve the adhesiveness of the films.
Jinglong Bu, Pengcheng Wang, Liqun Ai, Xiaoming Sang, Yungang Li
K. Bi et al., "Effect of Target Power and Bias on Adhesive Force of BCN Films", Advanced Materials Research, Vols. 287-290, pp. 2148-2151, 2011