Direct Writing Micro/Nano Structures on PZT Wafer by Laser Micromaching

Abstract:

Article Preview

The PZT is used for piezoelectric actuators that have high area efficiency but no good machinability. A direct writing micro structures on PZT wafer by excimer laser micromaching method has been proposed and confirmed. PZT nano-needle structures have also been fabricated by the direct writing method only by changing the laser micromachiong process parameters. The fabricated nano-needle structures can be very useful because of the need for studies on ferroelectric size effects as well as for potential applications such as ultra-high density memory devices.The relationship of process depth with the excimer laser parameters has been tested.

Info:

Periodical:

Advanced Materials Research (Volumes 291-294)

Edited by:

Yungang Li, Pengcheng Wang, Liqun Ai, Xiaoming Sang and Jinglong Bu

Pages:

1373-1376

DOI:

10.4028/www.scientific.net/AMR.291-294.1373

Citation:

Y. G. Li et al., "Direct Writing Micro/Nano Structures on PZT Wafer by Laser Micromaching", Advanced Materials Research, Vols. 291-294, pp. 1373-1376, 2011

Online since:

July 2011

Export:

Price:

$35.00

In order to see related information, you need to Login.

In order to see related information, you need to Login.