Direct Writing Micro/Nano Structures on PZT Wafer by Laser Micromaching
The PZT is used for piezoelectric actuators that have high area efﬁciency but no good machinability. A direct writing micro structures on PZT wafer by excimer laser micromaching method has been proposed and confirmed. PZT nano-needle structures have also been fabricated by the direct writing method only by changing the laser micromachiong process parameters. The fabricated nano-needle structures can be very useful because of the need for studies on ferroelectric size effects as well as for potential applications such as ultra-high density memory devices.The relationship of process depth with the excimer laser parameters has been tested.
Yungang Li, Pengcheng Wang, Liqun Ai, Xiaoming Sang and Jinglong Bu
Y. G. Li et al., "Direct Writing Micro/Nano Structures on PZT Wafer by Laser Micromaching", Advanced Materials Research, Vols. 291-294, pp. 1373-1376, 2011