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Direct Writing Micro/Nano Structures on PZT Wafer by Laser Micromaching

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Abstract:

The PZT is used for piezoelectric actuators that have high area efficiency but no good machinability. A direct writing micro structures on PZT wafer by excimer laser micromaching method has been proposed and confirmed. PZT nano-needle structures have also been fabricated by the direct writing method only by changing the laser micromachiong process parameters. The fabricated nano-needle structures can be very useful because of the need for studies on ferroelectric size effects as well as for potential applications such as ultra-high density memory devices.The relationship of process depth with the excimer laser parameters has been tested.

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Info:

Periodical:

Advanced Materials Research (Volumes 291-294)

Pages:

1373-1376

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.291-294.1373

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Online since:

July 2011

Authors:

Yi Gui Li, Jing Quan Liu, Chun Sheng Yang, Dan Nong He, Katsuhiko Tanaka, Susumu Sugiyama

Keywords:

Laser Micromaching, Microstructure, Nano-Needle PZT Structures, PZT

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© 2011 Trans Tech Publications Ltd. All Rights Reserved

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