Research and Design of Laser Accurate Displacement Measurement System

Xiao Gang Wang; Yue Wei Bai; Kai Liu

doi:10.4028/www.scientific.net/AMR.301-303.1289

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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 301-303Research and Design of Laser Accurate Displacement...

Research and Design of Laser Accurate Displacement Measurement System

Abstract:

Laser displacement sensor(LDS) displacement measurement is a non-contact measurement with more precision and a wide range of applications.。In this paper, a laser accurate displacement measurement system based on LDS and three-dimensional linear-servomotor-driven actuators (3D LSDA) is presented. The 3D LSDA moving system is composed of linear servo motor, precision movable liner mechanism and servo machine. It is driven to move the noncontact laser displacement sensor to scan surfaces through the three-dimensional electric displacement platform, and then the measurement data is processed. The displacement sensor resolution is 2μm; each dimensional electric displacement platform repeated positioning accuracy is higher than 5μm.

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Periodical:

Advanced Materials Research (Volumes 301-303)

Pages:

1289-1292

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.301-303.1289

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Online since:

July 2011

Authors:

Xiao Gang Wang, Yue Wei Bai, Kai Liu

Keywords:

Laser Displacement Sensor, Linear-Servomotor-Driven Actuator, Non-Contact Measurement, Servo Control System

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