Effects of Annealing Treatment and Buffer Layer on Properties of ZnMgO Films Prepared on Diamond Substrates

Abstract:

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ZnMgO films were prepared at room temperature on freestanding diamond (FSD) substrates with and without ZnO buffer layers by radio-frequency (RF) reactive magnetron sputtering method. The effects of annealing treatment and ZnO buffer layers on the structural, optical, and electrical properties of the ZnMgO films were studied by X-ray diffraction (XRD), UV-visible spectrophotometer, and electrical measurements. The experimental results suggested that the annealing treatment and buffer layer were helpful to improve the crystalline quality of ZnMgO/diamond heteroepitaxial films.

Info:

Periodical:

Advanced Materials Research (Volumes 311-313)

Edited by:

Zhongning Guo

Pages:

1205-1208

DOI:

10.4028/www.scientific.net/AMR.311-313.1205

Citation:

K. Tang et al., "Effects of Annealing Treatment and Buffer Layer on Properties of ZnMgO Films Prepared on Diamond Substrates", Advanced Materials Research, Vols. 311-313, pp. 1205-1208, 2011

Online since:

August 2011

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$35.00

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