Design of Control System Based on PLC for Polycrystalline Silicon Decomposition Furnace

Qiang Han; Yuan Lin Luo

doi:10.4028/www.scientific.net/AMR.383-390.5576

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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 383-390Design of Control System Based on PLC for...

Design of Control System Based on PLC for Polycrystalline Silicon Decomposition Furnace

Abstract:

It requires high security for useing silane decomposition reaction to produce the polycrystalline silicon. For this reason, the paper introduces the central facilities of the polycrystalline silicon production, and bases on production process, to devise a control system which combines PLC and industrial ethernet technology. The system controls temperature and pressure of the decomposition furnace, cooling water system, and production process. The practical result showes that the system is reliable and steady. It meets the requirements of process.

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Periodical:

Advanced Materials Research (Volumes 383-390)

Pages:

5576-5579

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.383-390.5576

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Online since:

November 2011

Authors:

Qiang Han, Yuan Lin Luo

Keywords:

Auto-Tuning PID, Decomposition Furnace, Polycrystalline Silicon, Programmable Logic Controller (PLC)

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References

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