Laser Scanner Stage Synchronization Method for Ultrafast and Wide Area Fabrication
This paper presents an on-the-fly method to synchronize a laser scanner and a linear stage for fast and wide area fabrication. Demands for high-precision laser processing with wide area have been increasing for a number of applications such as in solar cell batteries, display parts, electronic components, and the automobile industry. An ultra high-speed laser scanner system is limited by its size of scanning area, for example, its scanning area is only 50 × 50 mm2. Recently, a laser scanner system that could scan a wide area was developed; however, it was found that the scanning quality of this scanner decreased with an increase in the scanning area. The developed method is different from the existing step and scanning method in that it our method ensures continuous stage movement, which may improve the processing speed and in turn the laser fabrication quality.
K. H. Kim et al., "Laser Scanner Stage Synchronization Method for Ultrafast and Wide Area Fabrication", Advanced Materials Research, Vols. 383-390, pp. 6277-6282, 2012