Reliability Test and Evaluation Analysis of Silicon Pressure Sensor under Vibration Stress
The model silicon pressure sensor was taken as the object; in this paper, we built failure physics equation of sensor under the vibration stress based on the failure modes and failure mechanism of pressure sensor, and using vibration stress as the acceleration factor to process accelerated life testing under invariableness stress. The results show that failure physics equation of sensor yields the inverse power law relationship. The estimated value of reliability character and accelerated life equation of sensor under the vibration stress was attained through analyzing testing data and the average life and reliable life of sensor has been attained through reliability evaluation.
L. Qin and A. L. Shi, "Reliability Test and Evaluation Analysis of Silicon Pressure Sensor under Vibration Stress", Advanced Materials Research, Vols. 383-390, pp. 6969-6974, 2012