Effect of Nitrogen Doping on the Structure and Optical Properties of N-Type Hydrogenated Amorphous Silicon Thin Films

Abstract:

Hydrogenated amorphous silicon (a-Si:H) thin films doped with both Phosphor and Nitrogen are deposited by ratio frequency plasma enhanced chemical vapor deposition (PECVD). The effect of gas flow rate of ammonia (FrNH3) on the composition, microstructure and optical properties of the films has been investigated by X-ray photoelectron spectroscopy, Raman spectroscopy and ellipsometric spectra, respectively. The results show that with the increase of FrNH3, Si-N bonds appear while the short-range order deteriorate in the films. Besides, the optical properties of N-doped n-type a-Si:H thin films can be easily controlled in a PECVD system.

• Periodical: Advanced Materials Research (Volumes 383-390)
• Pages: 6980-6985
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.383-390.6980
• Online since: November 2011
• Authors: Mao Yang Wu, Wei Li, Jun Wei Fu, Yi Jiao Qiu, Ya Dong Jiang
• Keywords: Composition, Microstructure, Nitrogen Doping, N-Type Hydrogenated Amorphous Silicon Thin Films, Optical Property

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