Simulation Analysis of MEMS Based Capacitive Differential Pressure Sensor for Aircraft Application

Abstract:

In this paper, simulation solution for Microelectromechanical systems (MEMS) based capacitive differential pressure sensor for aircraft altimeter is proposed. The principle of proposed MEMS capacitive differential pressure sensor design was explained. Analysis for the measurement of center deflection and capacitive sensitivity square diaphragm membrane was done. Simulation on deflection and capacitive sensitivity was carried out for the range of pressure from 100mbar to1100mbar. Gold, diaphragm membrane was used in this analysis. Analysis result shows, linear variation on center deflection and capacitance variation which is more suitable for this application.

• Periodical: Advanced Materials Research (Volumes 403-408)
• Pages: 4152-4156
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.403-408.4152
• Online since: November 2011
• Authors: P. Eswaran, S. Malarvizhi
• Keywords: Capacitive Pressure Sensor, Capacitive Sensitivity, Differential Pressure Sensor, Membrane Diaphragm Modeling, Micro-Electromechanical System (MEMS), Micro-Sensor, Pressure Sensitivity

References

[1] Liwei Lin and Weijie Yun, MEMS Pressure Sensors for Aerospace Applications, Proceeding IEEE Aerospace Conference, 21-28 Mar 1998, Vol. 1, p.429 to 436.

DOI: 10.1109/aero.1998.686941

[2] Yong lee and kensall D. wise, A Batch-Fabricated Silicon Capacitive Pressure Transducer with Low Temperature Sensitivity, IEEE Transactions on Electron Devices, Vol. Ed-29, No. 1, January 1982, p.42 to 48.

DOI: 10.1109/t-ed.1982.20656

[3] Jeahyeong Han and Mark A. Shannon, Smooth Contact Capacitive Pressure Sensors in Touch- and Peeling-Mode Operation, IEEE Sensors Journal, Vol. 9, No. 3, March 2009, p.199 to 209.

DOI: 10.1109/jsen.2008.2011090

[4] Fang He, Qing-An Huang, Ming Qin, A silicon directly bonded capacitive absolute pressure sensor, Sensors and Actuators A, 135 (2007) 507–514.

DOI: 10.1016/j.sna.2006.09.022

[5] Wen H. Ko, Qiang Wang, Touch Mode Capacitive Pressure Sensors for Industrial Applications, Proceedings of IEEE Tenth Annual International workshop on Micro Electro Mechanical System 1997, p.284 to289.

DOI: 10.1109/memsys.1997.581828

[6] David C. Catling, High sensitive capacitive pressure sensor for measuring medium-vacuum gas pressure, Sensor and Actuator A 64 (1998) 157-164.

[7] Wen H. Ko, Qiang Wang, Touch mode capacitive pressure sensors, Sensors and Actuators A, 75 (1999) 242–251.

DOI: 10.1016/s0924-4247(99)00069-2

[8] Qiang Wang, Wen H. Ko, Modeling of touch mode capacitive sensors and diaphragms, Sensors and Actuators A 75 (1999) 230–241.

DOI: 10.1016/s0924-4247(99)00068-0

[9] Jeahyeong Han, et. al, Smooth Contact Mode Capacitive Pressure Sensor with Polyimide Diaphragm, Proceeding of IEEE conference on Sensors, 28-31, october 2007, p.1468 to 1471.

DOI: 10.1109/icsens.2007.4388691

[10] Fang He, Qing-An Huang, Ming Qin, A silicon directly bonded capacitive absolute pressure sensor, Sensors and Actuators A 135 (2007) 507–514.

DOI: 10.1016/j.sna.2006.09.022

[11] Darrin J. Young, Jiangang Du, Christian A. Zorman, and Wen H. Ko, High-Temperature Single-Crystal 3C-SiC Capacitive Pressure Sensor, IEEE Sensors Journal, Vol. 4, No. 4, August 2004, pp.464-469.

DOI: 10.1109/jsen.2004.830301

[12] US Standard atmosphere, 1976, NASA- TM-X-74335.