Simulation Analysis of MEMS Based Capacitive Differential Pressure Sensor for Aircraft Application
In this paper, simulation solution for Microelectromechanical systems (MEMS) based capacitive differential pressure sensor for aircraft altimeter is proposed. The principle of proposed MEMS capacitive differential pressure sensor design was explained. Analysis for the measurement of center deflection and capacitive sensitivity square diaphragm membrane was done. Simulation on deflection and capacitive sensitivity was carried out for the range of pressure from 100mbar to1100mbar. Gold, diaphragm membrane was used in this analysis. Analysis result shows, linear variation on center deflection and capacitance variation which is more suitable for this application.
P. Eswaran and S. Malarvizhi, "Simulation Analysis of MEMS Based Capacitive Differential Pressure Sensor for Aircraft Application", Advanced Materials Research, Vols. 403-408, pp. 4152-4156, 2012