Simulation Analysis of MEMS Based Capacitive Differential Pressure Sensor for Aircraft Application

Abstract:

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In this paper, simulation solution for Microelectromechanical systems (MEMS) based capacitive differential pressure sensor for aircraft altimeter is proposed. The principle of proposed MEMS capacitive differential pressure sensor design was explained. Analysis for the measurement of center deflection and capacitive sensitivity square diaphragm membrane was done. Simulation on deflection and capacitive sensitivity was carried out for the range of pressure from 100mbar to1100mbar. Gold, diaphragm membrane was used in this analysis. Analysis result shows, linear variation on center deflection and capacitance variation which is more suitable for this application.

Info:

Periodical:

Advanced Materials Research (Volumes 403-408)

Edited by:

Li Yuan

Pages:

4152-4156

DOI:

10.4028/www.scientific.net/AMR.403-408.4152

Citation:

P. Eswaran and S. Malarvizhi, "Simulation Analysis of MEMS Based Capacitive Differential Pressure Sensor for Aircraft Application", Advanced Materials Research, Vols. 403-408, pp. 4152-4156, 2012

Online since:

November 2011

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Price:

$35.00

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