Experimental Modal Characterization of MEMS Switches

Joel M. Book; Samuel F. Asokanthan; Tian Fu Wang

doi:10.4028/www.scientific.net/AMR.403-408.4598

Paper Titles

A Novel Autocalibration of 3-Axis MEMS Accelerometers Based on Improved PSO Algorithm
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A Comparative Study of Thin-Film and Reynolds Equation Simulation Models for Squeeze Film Damping in MEMS Plate Structures
p.4580

Air Damping Effects of MEMS Parallel-Plate Structure Using ANSYS Thin Film Analysis
p.4588

A MEMS Safe and Arm Device for Spin Stabilized Ammunition Fuze
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Experimental Modal Characterization of MEMS Switches
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A Simplified Prediction Method for EMI Generated by Three-Phase PWM Rectifier
p.4606

Optimization of Fabrication Process for MEMS Based Microneedles Using ICP Etching Technology
p.4611

Design and Modeling of a Wide Tuning Range, High Q, Low Supply Voltage MEMS Based Tunable Capacitor for Wireless Communication Applications
p.4617

Physical Level Simulation of PolyMUMPs Based Monolithic Tri-Axis MEMS Capacitive Accelerometer Using FEM Technique
p.4625

HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 403-408Experimental Modal Characterization of MEMS...

Experimental Modal Characterization of MEMS Switches

Abstract:

MEMS devices, Micro Electro-Mechanical Systems, are electrical and mechanical systems with characteristic dimensions on the order of microns. Since these systems have moving mechanical parts, characterization of their dynamics, including their modal parameters, is highly desirable. This paper describes the validation of an existing implementation of the Stochastic Subspace Identification (SSI) algorithm, called MACEC, for experimental modal analysis of a micro-cantilever switch. A white noise signal applied to the built-in electrostatic actuator in the switches excited a response measured using microscanning Laser Doppler Vibrometry (LDV). The modal parameters found using MACEC matched well those predicted by theory, thus validating this combination for experimental modal analysis of MEMS structures.

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Periodical:

Advanced Materials Research (Volumes 403-408)

Pages:

4598-4605

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.403-408.4598

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Online since:

November 2011

Authors:

Joel M. Book, Samuel F. Asokanthan, Tian Fu Wang

Keywords:

Component, Experimental Modal Analysis, Experimental Validation, Laser Doppler Vibrometry, MACEC, MEMS Switch, Output Only Identification

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