Design and Modeling of a Wide Tuning Range, High Q, Low Supply Voltage MEMS Based Tunable Capacitor for Wireless Communication Applications

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Abstract:

A simulation model for the analysis of MEMS capacitor has been developed using mechanical equivalencies. The capacitor structure used in this paper has four parallel plates to improve the tuning range. Two of the plates are suspended and the other two plates are fixed. The developed mechanical model is validated with the help of structure simulations performed using PolyMumps process. The simulation results show good correlation between the equivalent mechanical model and the structural model. The tuning range of the mechanical model developed is 2.465:1 where as the PolyMumps fabricated capacitor produces a tuning range of 2.4555:1.The mechanical resonant frequencies of the top and bottom suspended plates are simulated as 501 rad/sec and 706 rad/sec respectively.

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Advanced Materials Research (Volumes 403-408)

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4617-4624

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November 2011

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© 2012 Trans Tech Publications Ltd. All Rights Reserved

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[8] Michel R Hatch, Vibration Simulation Using Matlab and ANSYS, 2001, Chapman & Hall/CRC. Sreeja B. S (B'02–M'04) received her Bachelor of . Engineering degree from Bharathidasan University, Trichy in 2002 and the Master of Engineering degree from Sathyabama University, Chennai, India. Currently she is pursuing P. hD in the filed of MEMS devices for wireless communication. She was a Senior lecturer in the Sathyabama University. She is currently with Legenda Group of Colleges, Malaysia associated with University of East London, UK. Her current research is in MEMS devices for wireless communication Radha S (B'89-M'94'-P'04) received her Bachelor of Engineering degree from Madurai Kamarajar University, India in the year of 1989and Master of Engineering degree from Govt college of engineering, Ciombatore, India. in the year of 1994. She received her Doctorate degree from Anna University, Chennai, India in the year of 2004. Her current research interests are networking, wireless communication devices and wireless sensor networks. Currently she is working as a professor and head of the electronics and communication department in SSN University, India. She is a part of many professional bodies. She had been chosen as a candidate in Who's Who in Science and Engineering for 10th Anniversary Edition which spotlighting the leaders from the wide-ranging scientific and engineering fields published in December 2007 and 2010 by the complete family of Marquis Who's Who Publications. She had been awarded CTS – SSN Best Faculty Award – 2007 and 2009 for the outstanding performance for the academic year 2006-07 and 2008-09. IETE S.K. Mitra Memorial Award for the year 2006 was awarded for her by the Council of The Institutions of Electronics and Telecommunication Engineers for the paper titled Multicasting in Ad Hoc Networks using Node Transition Probability based Routing Algorithm, published in IETE Journal of Research, NewDelhi –September,. 2006. She had been awarded the best paper award several times.

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