Fabrication of Fine-Line Pattern with Image Reversal Process

Shuai Bao; Ai Hua Gao; Huan Liu; Wei Guo Liu

doi:10.4028/www.scientific.net/AMR.411.474

Paper Titles

Ballistic Characteristics of Non-Silicon MEMS Inertial Trigger Switch
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Failure Analysis and Design Improvements of MEMS Explosive Interrupter
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Simulation and Analysis of Measurement Method for Projectile Axial Acceleration by MEMS Sensor
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Achieving the Measurement of Tool Diameter by the Boundary Tracing Algorithm Based on Model
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Fabrication of Fine-Line Pattern with Image Reversal Process
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Research on the Tool Images Evaluation Based on Auto-Focus Technology
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A Rapid Separation Method for Nonuniform Image Segmentation
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Design of High Speed and Parallel Compression System Used in the Big Area CCD of High Frame Frequency
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FCM Clustering Segmentation Algorithms Based on Spatial Constraint
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HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 411Fabrication of Fine-Line Pattern with Image...

Fabrication of Fine-Line Pattern with Image Reversal Process

Abstract:

This paper describes a simple and effective lift-off method that relies upon a single layer of positive photoresist and lithography technology. We have succeeded in patterning narrow lines in a photoresist film by image reversal process. Image reversal with AZ 5214-E resist is characterized by contact lithography. A process of patterning different line widths was developed based on image reversal technology, using AZ5214-E, followed by pre-bake, exposure, reversal bake, flood exposure and development. We could obtain very neat patterns with 2-5μm dimensions and their relative features have been supported by scanning electron microscope (SEM) pictures. The application of the proposed process is suitable for the electrode fabrication in MEMS SAW devices.

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Periodical:

Advanced Materials Research (Volume 411)

Pages:

474-477

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.411.474

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Online since:

November 2011

Authors:

Shuai Bao, Ai Hua Gao, Huan Liu, Wei Guo Liu

Keywords:

AZ5214-E, Image-Reversal, Lift-Off

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