Study on a New Method to Produce NiTi Thin Film

Yi Guo Zhu; Wen Mao

doi:10.4028/www.scientific.net/AMR.415-417.1899

Paper Titles

Organic Plasma-Polymer Thin Film Coatings on Super-Hydrophilic Coated Surface for Increasing the Surface Durability against Scratch without Changing of Surface Wettability
p.1879

Effect of Nonstoichiometric Pb Content on the Properties of PZT Ceramics
p.1883

Thickness Effect on Spin Moment in Amorphous Co_0.9Fe_0.1 Films
p.1888

Effect of Neodymium Salt in the Anodization of Aluminum in Sulphuric Acid
p.1895

Study on a New Method to Produce NiTi Thin Film
p.1899

Effect of Cryogenic Treatment on Improving the Fracture Toughness of TiN Coated Cemented Carbide
p.1903

Effect of Microstructure on the Corrosion Behavior of TiN Coatings
p.1911

The Effects of Substrate Material and Surface Roughness on the Structure of SnO₂ Films
p.1917

Studying on Thickness Control of ITO Films Deposited Using RF Magnetron Sputtering
p.1921

HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 415-417Study on a New Method to Produce NiTi Thin Film

Study on a New Method to Produce NiTi Thin Film

Abstract:

A new method to prepare NiTi thin film with two separate targets is presented. In this technology, two pure Ni target and pure Ti target are fixed and the substrate is rotating. The final thin film structure is analyzed by Scanning Electron Microscope. Results show that there is no layer structure in the film; the sputtering power and the substrate temperature have great influence to the morphology of the film; all the grain pattern are column under different technological parameters.

You might also be interested in these eBooks

View Preview

Info:

Periodical:

Advanced Materials Research (Volumes 415-417)

Pages:

1899-1902

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.415-417.1899

Citation:

Cite this paper

Online since:

December 2011

Authors:

Yi Guo Zhu, Wen Mao

Keywords:

Microstructure, NiTi Thin Film, Preparation Technology Morphology

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

Citation:

References

[1] X.M. Wang, Z.F. Yue, Y.F. Wang and Y.H. Zhi: The super-elastic NiTi alloy mechanical properties and its application(Sciences Press, Beijing 2009)in china

Google Scholar

[2] L.B. Freund, S. Suresh: Thin Film Materials (Cambridge University Press, England 2004)

Google Scholar

[3] H. Rumpf, B. Winzek, C. Zamponi, W. Siegert, K. Neuking and E. Quandt: Mater. Sci. Eng.Vol.378 (2004), p.429

Google Scholar

[4] H. Rumpf, T. Walther, C. Zamponi, E. Quandt: Mater. Sci. Eng. Vol.415(2006), p.304

Google Scholar

[5] C.L. Shih, B.K. Lai and H. Kahn: J. MEMS. Vol.10(2001), p.69

Google Scholar

[6] A. Ohta, S. Bhansali, I. Kishimoto and A. Umeda: Sensors and Actuators. Vol.86(2000), p.165

Google Scholar

[7] H. Funakubo, Shape-Memory Alloys, translated by J. D. Kennedy (Gordon and Breach, New York, 1984), p.98

Google Scholar

[8] J.D. Busch et al., Shape-memory properties in Ni–Ti sputter-deposited film, J. Appl. Phys. 69(15) (1990 ),p.6224

Google Scholar

[9] Y.D. Fu, G. Wang, C. Liu and X.L. Meng: Rare Metal Materials and Engineering Vol.36 (2007), p.925

Google Scholar

[10] A.D. Johnsion: deposition techniques for TiNi thin film

Google Scholar