The Effects of Substrate Material and Surface Roughness on the Structure of SnO₂ Films

Abstract:

The optical and electrical properties of Tin oxide (SnO₂) tranparent conducting film are related to its structural properties. The films were grown by chemical vapor deposition on four different substrates at atmospheric pressure and temperatures of 420°C to investigate the effects of substrate material and surface roughness on their structure. A homemade vertical reactor was used for deposition from SnCl₄ + 2H₂O precursors. The structure were analyzed by X-ray diffraction (XRD), scanning electron microscopy( SEM). The results indicated that substrate material influenced the crystal size, compactedness and predominant planes of SnO₂ films while surface roughness influenced crystallization and compactedness of the films.

• Periodical: Advanced Materials Research (Volumes 415-417)
• Pages: 1917-1920
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.415-417.1917
• Online since: December 2011
• Authors: Chun Fang Li
• Keywords: SnO₂ Film, Structure, Substrate Material, Surface Roughness (SR)

References

[1] Korotcenkov G,Blinov I,BrinzariV, et al. Sensors and Actuators B, Vol. 122 (2) (2007) : P.519.

[2] Hyeong - Ho Park, Hyung - Ho Park, Ross H Hill, et al. Sensors and Actuators A, Vol.132 (2) (2006) : P.429.

[3] Simakov V V, Yakusheva O V, Grebennikov A I, et al. Technol Phys. Lett, Vol. 31 (8) (2005): P.339.

[4] O-Shik Kwon, Sook - I Hwang, Chang - Hyun Shim, et al. Sensors and Actuators B, Vol. 89 (1) (2003): P.158.

[5] WANGLei, DU Jun, MAO Changhui et al. Instrument Technique and Sensor, Vol. 2(2006): P.6.

[6] Messad A. Journal of Materials Science, Vol. 29(1994): P.5095.

[7] R. Karsl oglu, A. Alp and H. Akbulut. J. Coat. Technol. Res., Vol. 7 (4) (2010): P.503.