Silicon Float Zone Single Crystal Automatic Growth

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Abstract:

As basis of the big diameter crystal development, the single crystal automatic growth is the most important technique for system standardization and mass production. In this article, author introduced a new useful way for the single crystal automatic growth of float zone. By setting the growth interval and controlling parameter, PLC controller could automatically control the single crystal growth when the single crystal’s diameter is greater than 50mm. This method applied to the machine system can greatly reduce the fault of manual operation as well as labor intensity. Also it improved the single crystal quality which increases the ability to develop big diameter single crystal in the future.

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Periodical:

Advanced Materials Research (Volumes 430-432)

Pages:

361-364

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Online since:

January 2012

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© 2012 Trans Tech Publications Ltd. All Rights Reserved

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