Design and Analysis for the Hybrid Capacitance and Micro-Leverage Amplifier Actuator

Feng Li Liu; Yong Ping Hao

doi:10.4028/www.scientific.net/AMR.433-440.2827

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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 433-440Design and Analysis for the Hybrid Capacitance and...

Design and Analysis for the Hybrid Capacitance and Micro-Leverage Amplifier Actuator

Abstract:

This new hybrid capacitance and micro-leverage amplifier actuator was based on modifying existing structure and mechanism. That overcame the drawback of small displacement of the capacitance actuator in virtual of the micro-leverage amplifier. The amplifier time of the single micro-leverage amplifier was 4.5. Connect the 1×9 array with nine electrostatic capacitance micro-actuators with the amplifier and form a polymer actuator. The actuator whole size was limited to 4×4 mm, the maximum output displacement was 42μm under 15V voltage input. The pull-in voltage of the actuator array was 19V.

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Periodical:

Advanced Materials Research (Volumes 433-440)

Pages:

2827-2830

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.433-440.2827

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Online since:

January 2012

Authors:

Feng Li Liu, Yong Ping Hao

Keywords:

Actuator, Component, Hybrid, Micro-Electromechanical System (MEMS), Micro-Lever

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References

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