Analysis for Replication and Surface Roughness of Micro-Feature of Silicon Mold Insert by UV-LIGA Method

Abstract:

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This study demonstrates the replication property and surface roughness for metal micro-mold that combines the replica molding (REM) and electroforming techniques. The micro-mold firstly uses the silicon wafer to fabricate the master mold by UV-LIGA method, and then uses the sputtering method to sputter the Ni element as the seed layer on the surface of master mold. The electroforming method manufactures the Ni mold insert from the master mold with seed layer. Finally, this study uses the PDMS material to replicate the micro-feature from the Ni mold insert by replica molding. This study indicates the replication property and surface roughness of different micro-feature shapes and sizes (concave and convex) for Ni mold insert and molded PDMS.

Info:

Periodical:

Advanced Materials Research (Volumes 47-50)

Edited by:

Alan K.T. Lau, J. Lu, Vijay K. Varadan, F.K. Chang, J.P. Tu and P.M. Lam

Pages:

443-446

DOI:

10.4028/www.scientific.net/AMR.47-50.443

Citation:

C. F. Huang et al., "Analysis for Replication and Surface Roughness of Micro-Feature of Silicon Mold Insert by UV-LIGA Method", Advanced Materials Research, Vols. 47-50, pp. 443-446, 2008

Online since:

June 2008

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Price:

$35.00

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