Study on the Dielectric Properties of Hybrid and Porous Polyimide-Silica Films

Yi He Zhang; Qing Song Su; Li Yu; Hong Zheng; Hai Tao Huang; Guo Ge Zhang; Ying Bang Yao; Helen Lai Wah Chan

doi:10.4028/www.scientific.net/AMR.47-50.973

Paper Titles

A Novel Method to Synthesize Nanocrystalline Calcium Phosphates
p.956

Porous Ceramics for High Temperature Filters
p.960

Continuum Modeling on Macroscopic Domain Patterns during Stress Induced Phase Transition in NiTi Tubes
p.964

Preventing Metal Structure from Water-Seepage by Organic Sealants Comparing Research
p.968

Study on the Dielectric Properties of Hybrid and Porous Polyimide-Silica Films
p.973

Preparation and Characterization of Functional Geopolymer
p.977

Preparation of CF/BR Composite Used for Electromagnetic Shielding
p.980

Synthesis of Si₃N₄/Polyimide Hybrid Films
p.984

Preparation of Low-K Fluorinated Polyimide/Phlogopite Nanocomposites
p.987

HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 47-50Study on the Dielectric Properties of Hybrid and...

Study on the Dielectric Properties of Hybrid and Porous Polyimide-Silica Films

Abstract:

A sol-gel process was used to prepare polyimide-silica hybrid films from the polyimide precursors and TEOS in N,N- dimethyl acetamide, then the hybrid film was treated with hydrofluoric acid to remove the dispersed silica particles, leaving pores with diameters between 80nm to 1µm, depending on the size of silica particles. The structure and dielectric constant of the hybrid and porous films were characterized by FTIR,SEM. The porous films displayed relatively low dielectric constant compared to the hybrid polyimide-silica films.