Excitation and Detection Mechanism of Resonant Gas Sensors Based on Micro-Cantilever

Shuang Mei Li; Guan Min Li; Na Wang

doi:10.4028/www.scientific.net/AMR.479-481.2372

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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 479-481Excitation and Detection Mechanism of Resonant Gas...

Excitation and Detection Mechanism of Resonant Gas Sensors Based on Micro-Cantilever

Abstract:

This article analyzes the static and dynamic characteristics of the mcrocantilever. Methods about how to improve the frequency resolution is given on theory. Four pairs of resonant excited and detecting mechanism are analyzed with examples. Besides, the feasibility of the four methods applied in gas sensor is also discussed in the article.

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Periodical:

Advanced Materials Research (Volumes 479-481)

Pages:

2372-2375

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.479-481.2372

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Online since:

February 2012

Authors:

Shuang Mei Li, Guan Min Li, Na Wang

Keywords:

Gas Sensor, Micro Cantilever, Resonant Excited and Detecting

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