A ZnO Driven Silicon Cantilever for Nanoscale Actuation

Yan Hui Yuan; He Jun Du; Pei Hong Wang

doi:10.4028/www.scientific.net/AMR.486.23

Paper Titles

Effect of Thermal Treatment Temperature of Electrospun PET Nanofiber Mat on Tensile Properties
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Influence of Mo Content of Fe/Mo/Al₂O₃ on Flame Synthesis of Carbon Nanotubes
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Experimental Research of Visible Light-Induced Photocatalytic Oxidation Effects of SO₂ by N-Doping Nano-TiO₂
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A Study of DNA Combing Speed in Fabricating Nanochannel ElectroPoration (NEP) Chips
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A ZnO Driven Silicon Cantilever for Nanoscale Actuation
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Effect of Pd Nanoparticle on the Thermal Degradation Kinetics of Nylon 6/Pd Nanocomposite Prepared by a Dry Process
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Effect of Injection Molding Process on Electrical Conductivity and Mechanical Property of Nanoparticle Filled Polymer Composites
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Room-Temperature ZnO Nanoparticle Ethanol Gas Sensors under UV Illumination
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Investigation of Nano-Structured White Carbon Films
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HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 486A ZnO Driven Silicon Cantilever for Nanoscale...

A ZnO Driven Silicon Cantilever for Nanoscale Actuation

Abstract:

A micro silicon cantilever actuated by ZnO thin film was designed, fabricated and characterized. The ZnO thin film was deposited by RF sputtering at room temperature. The transverse piezoelectric constant d₃₁was found to be-4.66 pC/N. Time and frequency responses of the cantilever actuator were investigated by means of a laser Doppler vibrometer. The actuator has a sensitivity of 12 nm/V at 15 kHz. Its 1^st bending resonance was observed at 53 kHz. The bandwidth was found to be 27 kHz with damping of 0.35%. The cantilever demonstrated capability of high frequency actuation on a nanometer level.