Research on Ultra-Precision Machining of Silicon Nitride Ceramics: A Review

Su Jiang Dai; Yu Gang Ren; Tao Kong; Yong Liang Hu

doi:10.4028/www.scientific.net/AMR.497.294

Paper Titles

Experimental Study of Material Removal Rate for Rotary Curved Surface Workpieces of Si₃N₄ in Chemical-Mechanical Polishing Using Taguchi Technique
p.273

Study on Groove Shape of CMP Polishing Pad: A Review
p.278

Research on the Fracture Property of Glass Plate under Uniform Pressure
p.284

FEA on Deformation Behavior of Glass Plate in Elastic Deformation Machining Process
p.289

Research on Ultra-Precision Machining of Silicon Nitride Ceramics: A Review
p.294

Research on Tool Wear and Surface Characteristics in Ultrasonic Milling Carbon Fibre Reinforced Carbon Composite
p.299

Optical Performance of a Laser Point Source Strongly Emitted by an Aspheric Expander
p.304

Nanoparticulate-Reinforced Ti-Base Composites Prepared by Laser Cladding
p.311

Electrochemical Machining of Micro Slots Using Shaped Electrode
p.315

HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 497Research on Ultra-Precision Machining of Silicon...

Research on Ultra-Precision Machining of Silicon Nitride Ceramics: A Review

Abstract:

The contemporary aspects of ultra precision machining of Si3N4 with regards to enhanced productivity and precision demands is presented in this paper. This paper reviews the literature on machining technology of covering the history, Several machining methods of Si3N4 are discussed. By comparing their advantages and disadvantages, some beneficial conclusions, which have some guiding significance for the coming practical works, are reached.

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Periodical:

Advanced Materials Research (Volume 497)

Pages:

294-298

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.497.294

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Online since:

April 2012

Authors:

Su Jiang Dai, Yu Gang Ren, Tao Kong, Yong Liang Hu

Keywords:

Si₃N₄, Abrasive, Ultra-Precision Machining

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