Design and Fabrication of Micropump Actuated by Laser Shock Wave

Jun Chao Xia; Liang Cai Xiong; Peng Chen; You Wu

doi:10.4028/www.scientific.net/AMR.528.18

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Design and Fabrication of Micropump Actuated by Laser Shock Wave
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HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 528Design and Fabrication of Micropump Actuated by...

Design and Fabrication of Micropump Actuated by Laser Shock Wave

Abstract:

This paper proposes a novel approach for micropump driven, namely laser shock wave, with the advantages of high energy efficiency, remote control and wireless energy supply. The pump used here has the characteristics of simple structure, easy fabrication and low cost comparing to the traditional micropump. Firstly, a valveless micropump was designed and then manufactured through lithography and bonding. Secondly, modal analysis of the fluid-structure coupling system, i.e. micropump, was calculated, and the first natural frequency was chosen as the frequency of the laser pulse. Finally, experiments were done to validate the feasibility of the driving mode. Results show the new driving mode works well and may provide an alternative approach for microsystem driven.

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Periodical:

Advanced Materials Research (Volume 528)

Pages:

18-22

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.528.18

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Online since:

June 2012

Authors:

Jun Chao Xia, Liang Cai Xiong, Peng Chen, You Wu

Keywords:

Fluid-Structure Coupling, Laser Shock Wave, Micro-Nanofabrication, Modal Analysis, Valveless Micropump

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