Design and Fabrication of Thermocapillary Micro Bubble Pump

Tzong Shyng Leu; Yan Hao Liu

doi:10.4028/www.scientific.net/AMR.528.23

Paper Titles

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Compressive Mechanical Properties of Carbon Nanotube Sponges: Experiments and Modeling
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Design and Fabrication of Micropump Actuated by Laser Shock Wave
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Design and Fabrication of Thermocapillary Micro Bubble Pump
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Development of Nano-TiO₂ Coating on Titanium Alloy Substrate for Biomedical Applications
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Preparation and Characterization of Attapulgite-KH550 Nanocomposites and their Application to Methane Absorption
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Preparation and Characterization of Cellulose Nanowhiskers in N, N-Dimethylacetamide
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Preparation and Characterization of Chitosan-Poly(MA-PEG₄₀₀-SA) Nanoparticles as Drug Carrier
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HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 528Design and Fabrication of Thermocapillary Micro...

Design and Fabrication of Thermocapillary Micro Bubble Pump

Abstract:

In this paper, a novel MEMS-fabricated thermal bubble pump is proposed. By using thermocapillary effect in a microchannel loop, bubbles are designed to move only in one direction of the loop. Driving heater with a square-wave signal, bubble nucleates and grows asymmetrically above the heater. As soon as the heating pulse is turned off, an interesting phenomenon is found. Instead of bubble collapse, bubble moves toward growing direction. Continuous bubbles grow and move periodically when square-wave pulsing signals are applied. Thermocapillary pumping phenomena are achieved successfully in the experiments. By adjusting background temperature field, thermocapillary pumping phenomena can be sustained. Detailed mechanism for pumping force will be discussed in this paper.