The Anti-Oxidation Properties of MoS2/Sb2O3 Films

Yan Shuai Zhang; Hui Zhou; Zhi Hua Wan; Jun Zheng; Rui Peng Sang; La Mao Cao Yang

doi:10.4028/www.scientific.net/AMR.538-541.136

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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 538-541The Anti-Oxidation Properties of MoS2/Sb2O3 Films

The Anti-Oxidation Properties of MoS₂/Sb₂O₃ Films

Abstract:

The MoS₂/Sb₂O₃ films were prepared by RF magnetron sputtering. The films were stored in humid environment (25°C, 60%RH) 30 days. The anti-oxidation properties of MoS₂/Sb₂O₃ were studied by XPS. The composition was studied by XRF. The results show that the anti-oxidation properties were improved by doping Sb₂O₃. Introducing Sb₂O₃ into the films provides a substantial benefit to tribology properties of film.