Study on the Manufacture of Microfluidic Chip with Coated Glass

Yan He; Bai Ling Huang; Yong Lai Zhang; Li Gang Niu

doi:10.4028/www.scientific.net/AMR.548.254

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Study on the Manufacture of Microfluidic Chip with Coated Glass
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HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 548Study on the Manufacture of Microfluidic Chip with...

Study on the Manufacture of Microfluidic Chip with Coated Glass

Abstract:

In this paper, a simple and facile technique for manufacturing glass-based microﬂuidic chips was developed. Instead of using expensive dry etching technology, the standard UV lithography and wet chemical etching technique was used to fabricate microchannels on a K9 glass substrate. The fabrication process of microfluidic chip including vacuum evaporation, annealing, lithography, and BHF (HF-NH4F-H2O) wet etching were investigated. Through series experiments, we found that anneal was the critical factor for chip quality. As a representative example, a microfluidic channel with 20 m of depth, and 80 m of width was successfully prepared, and the channel surfaces are quite smooth. These results present a simple, low cost, flexible and easy way to fabricate glass-based microﬂuidic chips.

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Periodical:

Advanced Materials Research (Volume 548)

Pages:

254-257

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.548.254

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Online since:

July 2012

Authors:

Yan He, Bai Ling Huang, Yong Lai Zhang, Li Gang Niu

Keywords:

K9 Glass, Microfluidic Chip, Wet Etching

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