Thin-Film Residual Stress Detection Method Based on Flexible Hinges

Hai Wang; Yun Hua Tong

doi:10.4028/www.scientific.net/AMR.548.367

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HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 548Thin-Film Residual Stress Detection Method Based...

Thin-Film Residual Stress Detection Method Based on Flexible Hinges

Abstract:

The residual stress introduced in the thin-film process may caused some problems, especially after removing of the sacrificial layers below, the suspended structure may be bended due to the release. In this articles we will develop a new in-situ residual stress detection method based on flexible hinges for thin-film materials, then described the detection principle theoretically and simulated its properties by FEA method.

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Periodical:

Advanced Materials Research (Volume 548)

Pages:

367-371

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.548.367

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Online since:

July 2012

Authors:

Hai Wang, Yun Hua Tong

Keywords:

Finite Element Analysis (FEA), Flexible Hinges, Residual Stress, Thin Film

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