Mechanical Property Evaluation of ZnO Thin Films Using Nanoindentation and Scanning Probe Microscope

Abstract:

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The characteristics of morphology, friction and nanotribological properties of ZnO thin films were achieved by means of x-ray diffraction, scanning probe microscopy (SPM), and nanoindentation. The ZnO thin films were deposited by a radio frequency magnetron sputtering system. Surface geometry and friction analysis were derived from atomic force microscopy/friction force microscopy (AFM/FFM). The hardness and Young’s modulus of the ZnO thin films were investigated by nanoindentation measurements with a Berkovich indenter. The films exhibited an increase in the hardness with decreasing load i.e. the indentation size effect (ISE) was found. In addition, the nanoscratched mechanical property of the films was discussed.

Info:

Periodical:

Advanced Materials Research (Volumes 55-57)

Main Theme:

Edited by:

Tawee Tunkasiri

Pages:

609-612

DOI:

10.4028/www.scientific.net/AMR.55-57.609

Citation:

T. H. Fang and S.H. Kang, "Mechanical Property Evaluation of ZnO Thin Films Using Nanoindentation and Scanning Probe Microscope", Advanced Materials Research, Vols. 55-57, pp. 609-612, 2008

Online since:

August 2008

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$35.00

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