Mechanical Property Evaluation of ZnO Thin Films Using Nanoindentation and Scanning Probe Microscope

Te Hua Fang; S.H. Kang

doi:10.4028/www.scientific.net/AMR.55-57.609

Paper Titles

The Effects of Substrate Temperature on Optical Properties and Surface Morphology of Nickel Phthalocyanine Thin Films Grown by Organic Evaporator System
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Electrical Characterization of Diamond-Like Carbon Films Synthesized by Plasma Enhanced CVD Technique
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Effects of Gold Nanoparticles on the Fabrication of Red Colored High Refractive Index Lead Glass
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Fabrication of Zirconia Nanofibers Using Zirconatrane Synthesized by Oxide One-Pot Process as Precursor
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Mechanical Property Evaluation of ZnO Thin Films Using Nanoindentation and Scanning Probe Microscope
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Influences of Zr⁴⁺and Polyacrylamide on Structural and Optical Properties of ZnO Nanoparticles Prepared via Microwave Irradiation
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Functionalized Porous Clay Heterostructure for Heavy Metal Adsorption from Wastewater
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Niobium and Antimony-Modified Titanium Dioxide/Epoxy Thin Film for Proton Exchange Membrane Fuel Cell
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Improvement of Hydrophobic Properties of the Electrospun PVA Fabrics by SF₆ Plasma Treatment
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Mechanical Property Evaluation of ZnO Thin Films Using Nanoindentation and Scanning Probe Microscope

Abstract:

The characteristics of morphology, friction and nanotribological properties of ZnO thin films were achieved by means of x-ray diffraction, scanning probe microscopy (SPM), and nanoindentation. The ZnO thin films were deposited by a radio frequency magnetron sputtering system. Surface geometry and friction analysis were derived from atomic force microscopy/friction force microscopy (AFM/FFM). The hardness and Young’s modulus of the ZnO thin films were investigated by nanoindentation measurements with a Berkovich indenter. The films exhibited an increase in the hardness with decreasing load i.e. the indentation size effect (ISE) was found. In addition, the nanoscratched mechanical property of the films was discussed.