Effect of DC Power on Structural and Hydrophilic Activity of TiO₂ Films

Abstract:

In this work, we present the effect of DC power from 100 W to 500 W on the structural and hydrophilic activity of TiO2 films. The TiO2 films were prepared by DC magnetron sputtering on the glass substrate without any external heating. The structure of TiO2 films were analyzed by atomic force microscope and X-ray diffraction. XRD patterns indicated the films were amorphous. The surface roughness and grain size were enlarged by the increasing of the DC power while the substrate temperature was climbed up with the increasing of the DC power. From the point of energetic ion bombardment, it was related with DC power between sputtering processes. The hydrophilic activity of TiO2 films were analyzed by the contact angle meter. The water contact angle decrease with increasing of the DC power.

• Periodical: Advanced Materials Research (Volumes 55-57)
• Pages: 925-928
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.55-57.925
• Online since: August 2008
• Authors: C. Salawan, A. Muakngam, B. Sukbot, K. Aiempanakit, Supattanapong Dumrongrattana
• Keywords: DC Magnetron Sputtering, Dc Power, Hydrophilic, Titania (TiO₂)

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