The effect of the shape, size and kind of distribution of the silicon inclusions in Al-Si alloys of hypoeutectic, eutectic, and hypereutectic compositions (6–22 % Si) on the quality of oxide layer formed by micro-arc oxidation (MAO) is studied. The hitherto unknown phenomenon of oxide layer growth inhibition by the silicon particles under MAO is discovered and researched. The filling of near-surface pores by oxidation products in MAO process is observed also. The discovered ability to increase the properties of oxide layers obtained by the MAO due to prior directed modifica¬tion of the initial structure provides the good quality of oxide layers for aluminium alloys with high level of silicon content up to hypereutectic compositions of Al-Si alloys. The physical opportunity to get the high quality oxidized layers by MAO on structurally modified Al-Si alloys is confirmed for large-sized Al-Si alloys castings (including cylinder block for engine).