The Experiments Study of Polishing Characteristics during Polishing Process

Abstract:

The investigation of experiment becomes more important to increase the understanding of polishing performance. In this paper, a high precision polishing process test bench with in-situ measurement technology was applied to investigate the effects of operating parameters on polishing interfacial phenomena during mechanical polishing with IC1000 pad. The shear force and temperature rise were measured for stainless steel during mechanical polishing process. The surface temperature was measured by T-type thermocouples and the shear force was measured by a load transducer. The shear force for various particle size, applied load and rotation speeds during polishing process was demonstrated. Furthermore, the temperature rise under different slurry concentration was investigated. The experimental results contribute to the understanding of polishing mechanism and also provide an index to end-point-detection.

• Periodical: Advanced Materials Research (Volumes 591-593)
• Pages: 460-463
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.591-593.460
• Online since: November 2012
• Authors: Hung Jung Tsai, Hung Cheng Tsai, Pay Yau Huang, Jeng Haur Horng, Shun Jung Chiu
• Keywords: Chemical-Mechanical Polishing, Shear Force, Slurry Concentration, Temperature Rise

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