Fabrication and Performance Analysis of PMMA Substrate Diffuser/Nozzle Micro-Pump by CNC Milling Machine
A new low cost high performance PMMA micropump, developed for microfluidic system, is presented. According to the orifice flow theory, a diffuser/nozzle structure is fabricated with precision milling process, and packaged with the film-sealing at the condition of thermal bonding process. The size parameter of the diffuser/nozzle structure is 2.5mm *150µm, 8° conical angle, the volume of PMMA micropump is 14×14×2.5 mm3. And experimental results show that the PMMA micropump can produce a maximum back pressure of 1906.1Pa and a maximum flow rate of 564µL/min under 220 V, 500Hz squired wave power supply.
L. Tian et al., "Fabrication and Performance Analysis of PMMA Substrate Diffuser/Nozzle Micro-Pump by CNC Milling Machine", Advanced Materials Research, Vols. 60-61, pp. 198-201, 2009