Effects of Substrate Temperature on Structure and Properties of Al-F Co-doped ZnO Thin Films

Abstract:

ZnO:(Al, F) thin films on glass substrates have been prepared by RF magnetron sputtering. The influence of substrate temperature on the microstructure,optical and electrical properties of ZnO(Al,F) films have been studied. The effects of substrate temperature on structure and optical and electronical properties of ZnO:Al:F thin films were investigated by XRD,SEM,UV-Visible spectrophotometry and four-point proble method.Experimental results indicate that substrate temperature affects the structure and properties of the thin films considerably.The lowest resistivity obtained in this study was 9.95×10-3 Ω∙cm for the film with average visible transmittance of 90% which was deposited at the substrate temperature of 300°C.

• Periodical: Advanced Materials Research (Volumes 602-604)
• Pages: 1404-1408
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.602-604.1404
• Online since: December 2012
• Authors: Rui Xin Ma, Shi Na Li, Guo Quan Suo
• Keywords: RF Magnetron Sputtering, Thin Film, ZnO:(Al-F)

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