For Libraries For Publication Open Access Downloads About Us Contact Us
Paper Titles
Investigation of Low-Cost Copper Interconnection Cleaning Using Hydrogen Radicals Generated by Heated Catalyst
p.1379
Study on Preparation of Modified Ti-Based Lead Dioxide Electrode and Degraded Methylene Blue
p.1383
The Plasma Electrolytic Oxidation Process in K2ZrF6 with Na2HPO4 Electrolyte
p.1387
The Purification and Analysis of 6 - Hydroxy -2 - Naphthoic Acid
p.1391
Effect of Substrate Temperature on the Opto-Electrical Propertites of Ti Doped ITO Films Deposited by RF Magnetron Sputtering
p.1399
Effects of Substrate Temperature on Structure and Properties of Al-F Co-doped ZnO Thin Films
p.1404
Influence of Deposition Time on the Properties of Highly-Oriented SnS Thin Films Prepared Using the Thermal Evaporation Method
p.1409
Synthesis and Photocatalytic Properties of TiO2 Film with Hierarchical Structure Prepared by Sol-Gel Method
p.1413
Point Defect States of Phononic Crystal Thin Plates – An Application of Finite Element Method
p.1419

Effect of Substrate Temperature on the Opto-Electrical Propertites of Ti Doped ITO Films Deposited by RF Magnetron Sputtering

Article Preview

Abstract:

Ti doped ITO (ITO:Ti) thin films were fabricated on glass substrates by RF magnetron sputtering using only one piece of ITO:Ti ceramic target at different substrate temperature (Ts). The effect of substrate temperature on structural, electrical, and optical properties of the films was investigated. It is confirmed that the resistivity of the films decreases with the increase of Ts till the minimum value of 2.5×10-4 Ω•cm and the transmittance in visible wavelengths is higher than 90%. "Blue shift" and "red shift" of UV absorption edge of the film were observed when Ts200 °CHeaders and footers

You might also be interested in these eBooks
Progress in Materials and Processes View Preview

Info:

Periodical:

Advanced Materials Research (Volumes 602-604)

Pages:

1399-1403

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.602-604.1399

Citation:

Cite this paper

Online since:

December 2012

Authors:

Rui Xin Ma, Shi Na Li, Guo Quan Suo

Keywords:

ITO:Ti, RF Magnetron Sputtering, Substrate Temperature, Thin Film

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

© 2013 Trans Tech Publications Ltd. All Rights Reserved

Share:

Citation:

References

[1] D.S. Ginleyetal : Handbook of Transparent Conductors. (2010), p.1.

Google Scholar

[2] Ohno S., Y. Kawaguchi: Sci. and Technol. of Advanced Materials. Vol. 7(2006), p.56.

Google Scholar

[3] Nishimura E., T. Sasabayashi: Japanese Journal of Applied Physics. Vol. 46(2007), p.7806.

Google Scholar

[4] B. Zhang, X. Dong : Scripta Materialia. Vol. 58(2008), p.203.

Google Scholar

[5] Ashida T., A. Miyamura :J. of App. Phy. Vol. 105( 2009), pp.703-709.

Google Scholar

[6] Shin D. -H., Y. -H. Kim : Transactions of Nonferrous Metals Society of China. Vol. 19 (2009), p.997.

Google Scholar

[7] S. M. Rozat, T. Ganj : Renewable Energy. Vol. 29(2004), p.1671.

Google Scholar

[8] Manoj P., B. Joseph: Ceramics International. Vol. 33 (2007), p.273.

Google Scholar

[9] Aouaj M. A., R. Diaz: Materials Research Bulletin. Vol. 44 (2009), p.1458.

Google Scholar

[10] Kondo T., Y. Sawada: Electrochemical and Solid-State Letters. Vol. 12 (2009), p.42.

Google Scholar

[11] Senthilkumar V., P. Vickraman: Vacuum. Vol. 84 (2010), p.864.

Google Scholar

[12] Radhouane Bel Hadj Tahar, Takayuki Ban, Yutaka Ohya: J. Appl. Phys. Vol. 83(1998) 2139.

Google Scholar

[13] M. J. Alam1,D. C. Cameron : Thin Solid Films . Vol. 76 (2002), pp.420-421.

Google Scholar

[14] Daoudi, K., B. Canut : Materials Science and Engineering. Vol. C 21(1-2)( 2002 ), p.313.

Google Scholar

[15] Kelly P. and R. Arnell: Vacuum. Vol. 56(2000), p.159.

Google Scholar

[16] Yang C. -H., S. -C. Lee : Materials Science and Engineering. Vol. B 134(2006), p.68.

Google Scholar

[17] Choi J. B., J. H. Kim: Materials Science and Engineering Vol. B 102(2003), p.376.

Google Scholar

[18] Sarkar A., Ghosh S., Chaudhuri S : Thin Solid Films Vol. 204(1991), p.255.

Google Scholar

© 2025 Trans Tech Publications Ltd. All rights are reserved, including those for text and data mining, AI training, and similar technologies. For open access content, terms of the Creative Commons licensing CC-BY are applied.
Scientific.Net is a registered trademark of Trans Tech Publications Ltd.