Recycling of SiC in Crystalline Silicon Cutting Fluid

Jing Jing Zhu; Qun Qun Huang; Shui Qing Yang; Wei Luo; Jun Lin

doi:10.4028/www.scientific.net/AMR.622-623.504

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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 622-623Recycling of SiC in Crystalline Silicon Cutting...

Recycling of SiC in Crystalline Silicon Cutting Fluid

Abstract:

Both merits and demerits of existing recovery techniques of crystalline silicon scrap cutting fluid were analyzed and compared in this paper. In the thesis, a new separation process for separating and recovering SiC in crystalline silicon cutting fluid was presented. The performance index of recycled SiC powder is equal/familiar to the new one, and that can replace the use of new one completely.

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Periodical:

Advanced Materials Research (Volumes 622-623)

Pages:

504-507

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.622-623.504

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Online since:

December 2012

Authors:

Jing Jing Zhu, Qun Qun Huang, Shui Qing Yang, Wei Luo, Jun Lin

Keywords:

Crystalline Silicon, Cutting Fluid, Silicon Carbide (SiC)

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References

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