Controlled Patterning and Dimensional Control of Suspended Carbon Nanofibers

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A simpleand inexpensive top down approach to fabricate micropatterned carbon micro- and nano-fibers has been developed combiningCarbon-MEMS technology, Low Voltage Near-Field Electrospinning (LVNFES),and isotropic dry etching.A multitude of applications can take advantage of these patterned carbon nanofibers especially in the field of electrochemical sensors and nanoelectronics. In particular, wehave developed a novel polymeric ink that exhibits excellent electrospinning capability in a LVNFES setup and that does survive the pyrolysis process. To illustrate the potential of this new ink, we have fabricated carbon fiberssuspended on Carbon-MEMS structures.The fiber thickness can be controlled by adjusting the LVNFES voltage and using isotropic oxygen plasma based dry etching.

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43-49

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December 2012

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© 2013 Trans Tech Publications Ltd. All Rights Reserved

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