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HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 629Nonlinearity Errors in Heterodyne Interferometer:...

Nonlinearity Errors in Heterodyne Interferometer: A Survey

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Abstract:

As the most important error source in the heterodyne interferometer, the nonlinearity errors reduce the measurement accuracy in the nanometric or picometric measurement. This survey states both the definition of nonlinearity errors and the cause of the errors. Moreover, two kinds of methods for detection and compensation of the nonlinearity errors are also discussed respectively in this paper.

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Material Sciences and Manufacturing Technology

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Periodical:

Advanced Materials Research (Volume 629)

Pages:

511-514

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.629.511

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Online since:

December 2012

Authors:

Hai Jiang Hu, Ju Ju Hu, Ying Hua Ji

Keywords:

Heterodyne Interferometer, Nonlinearity, Precision Measurement

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© 2013 Trans Tech Publications Ltd. All Rights Reserved

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