Fabrication of Hollow Microneedle Arrays Based on Special X-Ray Exposure

Abstract:

Two methods for fabricating hollow micro needle arrays have been described. One method is that fabricating hollow micro needle array based on double X-ray exposures-----one exposure is normal X-ray exposure with X-ray mask and the other is X-ray exposure without X-ray mask. The other method is based on moving mask X-ray exposures plus an alignment X-ray exposure. The feasibilities for the hollow micro needle arrays were demonstrated by fabricating 25 micro needles in a 5x5 mm2 polymer chip.

• Periodical: Advanced Materials Research (Volume 662)
• Pages: 95-98
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.662.95
• Online since: February 2013
• Authors: Yi Gui Li, Susumu Sugiyama
• Keywords: Alignment, Hollow Micro Needle Array, X-Ray Exposure

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