A Fabrication for Ameliorating Pyroelectric Harvesting Converters

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Abstract:

A three-dimensional pattern is helpful to improve the temperature variation rates in pyroelectric elements, using lateral temperature gradients induced on the sidewalls of the responsive elements. Creating a complex pattern with a deep trench structure for fitting various discharges of waste heat was imperative, and hard to fabricate, using the traditional methods of dry/wet etching and a dicing saw. A novel method using sandblast etching was successful in fabricating the complex pattern of the vortex-like electrode for improving the electrical output and enhancing the efficiency of the PZT pyroelectric harvesting converters.

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438-442

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April 2013

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© 2013 Trans Tech Publications Ltd. All Rights Reserved

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