High Performance Transparent Conducting Sb-Doped SnO2 Films Fabricated by Spray Pyrolysis

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Sb-doped SnO2 (ATO) films were successfully prepared by the spray-pyrolysis method with SnCl2•2H2O and SbCl3 as precursors. The structural, surface morphological, electrical and optical properties of the films were studied in details. The results indicated that all films consisted of tetragonal cassiterite SnO2 with preferred orientation along (110) and (200) crystal plane. A minimum resistivity as low as 1.59×10-3 Ω∙cm has been achieved. The infrared emissivity of the films on the surface of glass was ca. 0.36, which presents potential application in the low-emission window and building ceramics.

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85-89

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April 2013

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© 2013 Trans Tech Publications Ltd. All Rights Reserved

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