Study on Wurtzite-ScxAI1-XN Thin Film: A Review

Yu Bin Jia

doi:10.4028/www.scientific.net/AMR.690-693.1698

Paper Titles

Effects of Preparing Conditions on NO₂-Sensing Properties of Sputtered WO₃ Nano-Films
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Electrochromic Property of Sputtered Amorphous NiO Films
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Hydrogen Induced Modifications of Optical and Electric Properties in Mg Thin Films
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Structure Characterization of W-Doped Vanadium Oxide Thin Films Prepared by Reactive Magnetron Sputtering
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Study on Wurtzite-Sc_xAI_1-XN Thin Film: A Review
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The Structure and Magnetic Properties of NiZn-Ferrite Films Deposited by Magnetron Sputtering at Room Temperature
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ZnSe Quantum Dot Films Deposition from Modified Chemical Solution with Sodium Citrate
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Bending Ratcheting Behavior of Zircaloy-4 Alloy at Room Temperature
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Experimental Study on Fatigue Behavior of 35CrMo Steel after Torsional Prestrain
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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 690-693Study on Wurtzite-ScxAI1-XN Thin Film: A Review

Study on Wurtzite-Sc_xAI_1-XN Thin Film: A Review

Abstract:

A review of the recent study on w-Sc_xAI_1-XN alloy is presented in this paper. w-Sc_xAI_1-XN alloy is a high temperature piezoelectric material, which exhibits a good balance between high maximum use temperature and large piezoelectricity. The experiment results have shown the piezoelectric modulus d₃₃ for Sc_xAI_1-XN with x=0.43 reached up to 27.6pCN^-1, which is at least 400-500% larger than AIN. This piezoelectric alloy thin film material can be grown on various substratesCe.g. silicon (001), AI₂O₃ (0001), MgO (111), TiN(111), etc.Cby dual radio frequency magnetron reactive co-sputtering system. The origin of the anomalous piezoelectric response based on quantum mechanical calculation and the dielectric properties based on experimental measurement in w-Sc_xAI_1-XN alloy have been also reviewed in this paper.

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Advanced Materials Research (Volumes 690-693)

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1698-1701

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https://doi.org/10.4028/www.scientific.net/AMR.690-693.1698

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Online since:

May 2013

Authors:

Yu Bin Jia

Keywords:

Ab Initio Theory, Fist-Principle, Leakage Current, Piezoelectric Modulus, Piezoelectric Response, w-Sc_xAI_1-XN Alloy

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