Monolithically Integrated MEMS Optical Device with Switching and Attenuating Function

Article Preview

Abstract:

In this paper, a monolithically integrated device composed of optical switch (OS) and variable optical attenuator (VOA) is described. The device shows more functionality and more compactness in the all optical networks. Besides the advantage of wide attenuation range, its fabrication is simple and reliable. In our laboratory, a monolithically integrated optical device has been fabricated and setup for investigation. Experimental results have shown that the proposed approaches improve the compositive performance.

You might also be interested in these eBooks

Info:

Periodical:

Pages:

491-494

Citation:

Online since:

June 2013

Export:

Price:

Permissions CCC:

Permissions PLS:

Сopyright:

© 2013 Trans Tech Publications Ltd. All Rights Reserved

Share:

Citation:

[1] J.M. Walker, "The future of MEMS in telecommunications networks", J. Micromech. Microeng, Vol. 10, pp. R1-R7 (2000).

DOI: 10.1088/0960-1317/10/3/201

Google Scholar

[2] C. H. Kim and Y. K. Kim, "MEMS variable optical attenuator using a translation motion of 45 tilted vertical mirror," J. Micromech. Microeng., Vol. 15, pp.1466-1475, 2005.

DOI: 10.1088/0960-1317/15/8/013

Google Scholar

[3] M. W. Pruessner, N. Siwak, K. Amarnath, S. Kanakaraju, W.-H. Chuang and R.Ghodssi, "End-coupled Optical waveguide MEMS Devices in the Indium Phosphide Material System," J. Micromech. Microeng., Vol. 16, pp.832-842, 2006.

DOI: 10.1088/0960-1317/16/4/021

Google Scholar

[4] Pablo A. Costanzo-Caso, Michael Gehl, Sergio Granieri, Azad Siahmakoun, "Optical bistable switching with symmetrically configured SOAs in reverse bias," Microwave Opt Technol Lett, Vol. 52, No. 12, pp.2753-2759, (2010)

DOI: 10.1002/mop.25594

Google Scholar

[5] Yao-Joe Yang,Wen-Cheng Kuo, Kuang-Chao Fan and Wu-Lang Lin, "A 1 × 2 optical fiber switch using a dual-thickness SOI process," J. Micromech. Microeng. Vol. 17, p.1034–1041, 2007.

DOI: 10.1088/0960-1317/17/5/025

Google Scholar

[6] H. Toshiyoshi, K. Isamoto, A. Morosawa, M. Tei, and H. Fujita, "A 5-VOLT OPERATED MEMS VARIABLE OPTICAL ATTENUATOR", in Digest Tech. Papers Transducers'03 Conference, Boston, June 8-12, pp.1768-1771, 2003.

DOI: 10.1109/sensor.2003.1217128

Google Scholar

[7] Wu, et al "Design and use of compact lensed fibers for low cost packaging of optical MEMS components," IEEE J. Micromech.Microeng.14, pp.1367-1375, 2004.

DOI: 10.1088/0960-1317/14/10/011

Google Scholar

[8] T. J. Chan, Y. C. Ku, C. K. Chan, L. K. Chen, and F. Tong, "A novel bidirectional wavelength division multiplexed passive optical network with 1:1 protection," in Proc. Optical Fiber Communications Conf. (OFC), Atlanta, GA, Mar. 2003, Vol. 2, p.779–781.

DOI: 10.1109/ofc.2003.316179

Google Scholar

[9] Yan Jian-Hua, Ou Wen, Ou Yi, Caixia Liu, Zhao Li-Jun, "Design and fabrication of novel microlens–micromirrors array for infrared focal plane array," Microwave Opt Technol Lett, Vol. 54, No. 4, pp.879-884, (2012)

DOI: 10.1002/mop.26722

Google Scholar

[10] Peroulis D, Pacheco S P, Sarabandi K and Katehi L P B, "Electromechanical considerations in developing low-voltage RF MEMS switches" IEEE Trans. Microw. Theory, Vol. 51, p.259–270, 2003.

DOI: 10.1109/tmtt.2002.806514

Google Scholar