Development of MEMS VOA with only One Shutter for Dual Signals Simultaneous Operation

Abstract:

A MEMS variable optical attenuator (VOA) with only one shutter for dual signals simultaneous operation is designed for advanced tuning functions. Theoretical electro-mechanism model has also been developed to provide optimization for the VOA design. In experiment, the fabricated VOA device has demonstrated a over 40-dB attenuation range with respect to the driving voltage of one shutter, and it has also realized low polarization-dependent performance. The superior specifications make this device very promising for optical network systems and laboratory equipment.

• Periodical: Advanced Materials Research (Volume 709)
• Pages: 481-484
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.709.481
• Online since: June 2013
• Authors: Qing Hua Chen, Yan Mei Li, Ying Jun Chen, Wen Gang Wu
• Keywords: Dual Signals, Grid, MEMS, Shutter, VOA

References

[1] Sunish Mathews, Gerald Farrell and Yuliya Semenova, "Experimental demonstration of an all-fiber variable optical attenuator based on liquid crystal infiltrated photonic crystal fiber," Microwave Opt Technol Lett, Vol. 53 (2011) No. 3, pp.539-543.

DOI: 10.1002/mop.25789

[2] Zhang, B. L., Luo, Y., Liu, X. G. & Barbastathis, G. Macroscopic invisibility cloak for visible light. Phys. Rev. Lett. 106, 033901 (2011).

DOI: 10.1103/physrevlett.106.033901

[3] Koh K H, Kobayashi T, Hsiao F-L and Lee C 2010 Characterization of piezoelectric PZT beam actuators for driving 2D scanning micromirrors Sensors Actuators A 162 336–47.

DOI: 10.1016/j.sna.2010.04.021

[4] Jacob, Z., Kim, J. Y., Naik, G. V., Boltasseva, A., Narimanov, E. E. & Shalaev, V.M. Engineering photonic density of states using metamaterials. Appl. Phys. B 100, 215–218 (2010).

DOI: 10.1007/s00340-010-4096-5

[5] Yao-Joe Yang,Wen-Cheng Kuo, Kuang-Chao Fan and Wu-Lang Lin, "A 1 × 2 optical fiber switch using a dual-thickness SOI process," J. Micromech. Microeng. Vol. 17 (2007), p.1034–1041.

DOI: 10.1088/0960-1317/17/5/025

[6] H. Toshiyoshi, K. Isamoto, A. Morosawa, M. Tei and H. Fujita, "A 5-VOLT OPERATED MEMS VARIABLE OPTICAL ATTENUATOR", in Digest Tech. Papers Transducers'03 Conference (Boston, June 8-12, 2003), pp.1768-1771.

DOI: 10.1109/sensor.2003.1217128

[7] Wu, et al "Design and use of compact lensed fibers for low cost packaging of optical MEMS components," IEEE J. Micromech.Microeng. Vol. 14 (2004), pp.1367-1375.

DOI: 10.1088/0960-1317/14/10/011

[8] M. W. Pruessner, N. Siwak, K. Amarnath, S. Kanakaraju, W.-H. Chuang and R.Ghodssi, "End-coupled Optical waveguide MEMS Devices in the Indium Phosphide Material System," IEEE J. Micromech.Microeng., Vol 16 (2006), pp.832-842.

DOI: 10.1088/0960-1317/16/4/021

[9] Yan Jian-Hua, Ou Wen, Ou Yi, Caixia Liu and Zhao Li-Jun, "Design and fabrication of novel microlens–micromirrors array for infrared focal plane array," Microwave Opt Technol Lett, Vol. 54 (2012) No. 4, pp.879-884.

DOI: 10.1002/mop.26722

[10] Boardman, A. D. et al. Active and tunable metamaterials. Laser Photonics Rev. 5, 287–307 (2011).

[11] He, X., Lv, Z., Liu, B. & Li, Z. Tunable magnetic metamaterial based multi-splitring resonator (MSRR) using MEMS switch components. Microsys. Tech. 17, 1263–1269 (2011).

DOI: 10.1007/s00542-011-1313-z